| Research group: | Nanobiotechnology | Year: | 2008 | ||
|---|---|---|---|---|---|
| Type of Publication: | Article | ||||
| Authors: | M J Lopez; D Caballero; E M Campo; R Perez-Castillejos; A Errachid; J Esteve; J A Plaza | ||||
| Journal: | Journal of Micromechanics and Microengineering | Volume: | 18 | ||
| Number: | 7 | Pages: | 075021 | ||
| Abstract: | Novel medical and biological applications are driving increased interest in the fabrication of micropipette or micro-dispensers. Reduced volume samples and drug dosages are prime motivators in this effort. We have combined microfabrication technology with ion beam milling techniques to successfully produce cantilever-type polysilicon micro-dispensers with 3D enclosed microchannels. The microfabrication technology described here allows for the designing of nozzles with multiple shapes. The contribution of ion beam milling has had a large impact on the fabrication process and on further customizing shapes of nozzles and inlet ports. Functionalization tests were conducted to prove the viability of ion beam-fabricated micro-dispensers. Self-assembled monolayers were successfully formed when a gold surface was patterned with a thiol solution dispensed by the fabricated micro-dispensers. |
||||