Focused ion beam-assisted technology in sub-picolitre micro-dispenser fabrication

Research group: Nanobiotechnology Year: 2008
Type of Publication: Article
Authors: M J Lopez; D Caballero; E M Campo; R Perez-Castillejos; A Errachid; J Esteve; J A Plaza
Journal: Journal of Micromechanics and Microengineering Volume: 18
Number: 7 Pages: 075021
Abstract:
Novel medical and biological applications are driving increased interest in the fabrication of micropipette or micro-dispensers. Reduced volume samples and drug dosages are prime motivators in this effort. We have combined microfabrication technology with ion beam milling techniques to successfully produce cantilever-type polysilicon micro-dispensers with 3D enclosed microchannels. The microfabrication technology described here allows for the designing of nozzles with multiple shapes. The contribution of ion beam milling has had a large impact on the fabrication process and on further customizing shapes of nozzles and inlet ports. Functionalization tests were conducted to prove the viability of ion beam-fabricated micro-dispensers. Self-assembled monolayers were successfully formed when a gold surface was patterned with a thiol solution dispensed by the fabricated micro-dispensers.
[ Back ]