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Mills, C. A., Fernandez, Javier G., Errachid, A., Samitier, J., (2008). The use of high glass temperature polymers in the production of transparent, structured surfaces using nanoimprint lithography Microelectronic Engineering , 85, (9), 1897-1901

Polymers with high glass transition temperatures, fluorinated ethylene propylene copolymer (FEP) and poly(ethylene naphthalate) (PEN), have been used in imprint lithography as a protective support layer and as a secondary mould, to imprint superficial structures into a polymer with a lower glass transition temperature, namely poly(methyl methacrylate) (PMMA). As a support layer, FEP replaces fragile silicon based supports for the production of freestanding, structured sheets of PMMA, useful, for example, in biomedical applications where transmittance optical microscopy is required. Secondary PEN moulds, produced by imprinting using silicon-based primary moulds, have been used to transfer sub-micrometer tall structures to a freestanding PMMA sheet. Similarly, hole structures, with different dimensions, have been embossed in both sides of a PMMA sheet simultaneously.

Keywords: Polymer engineering, Embossing, Nanoimprint lithography, Biomedical applications